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粉末冶金材料科学与工程  2024, Vol. 29 Issue (5): 373-383    DOI: 10.19976/j.cnki.43-1448/TF.2024034
  工艺技术 本期目录 | 过刊浏览 | 高级检索 |
化学气相沉积SiC涂层的制备及水热腐蚀行为
毛健, 陈招科, 徐振男, 熊翔
中南大学 轻质高强结构材料国家级重点实验室,长沙 410083
Preparation and hydrothermal corrosion behavior of SiC coating by chemical vapor deposition
MAO Jian, CHEN Zhaoke, XU Zhennan, XIONG Xiang
State Key Laboratory for Light Weight and High Strength Structural Materials, Central South University, Changsha 410083, China
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摘要 采用化学气相沉积法在高纯石墨块上制备SiC涂层,并进行水热腐蚀实验,研究化学气相沉积工艺、涂层形貌结构与涂层水热腐蚀行为的关系。结果表明:随稀释氢气流量增大,涂层平均晶粒尺寸减小,涂层出现游离Si的可能性增大,其耐水热腐蚀性能逐渐降低;随沉积温度从1 000 ℃升高至1 300 ℃,涂层结晶度和平均晶粒尺寸都先增大后减小,在沉积温度为1 200 ℃时获得最大值,水热腐蚀后涂层结构和晶粒形貌保持完好;随三氯甲基硅烷水浴温度升高,涂层的平均晶粒尺寸增大,50 ℃水浴温度下制备的涂层结晶度最差且被腐蚀得最严重。
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毛健
陈招科
徐振男
熊翔
关键词 SiC涂层化学气相沉积水热腐蚀晶粒尺寸结晶度    
Abstract:SiC coating was prepared on high-purity graphite using chemical vapor deposition method, and hydrothermal corrosion experiment was conducted to study the relationship between chemical vapor deposition process, coating morphology and structure, and coating hydrothermal corrosion behavior. The results show that with the increase of dilution hydrogen flow rate, the average grain size of the coating decreases, the possibility of free Si appearing in the coating increases, and the resistance to hydrothemal corrosion gradually decreases. As the deposition temperature increases from 1 000 ℃ to 1 300 ℃, the crystallinity and average grain size of the coating first increases and then decreases. The maximum value is obtained at a deposition temperature of 1 200 ℃, and the coating structure and grain morphology remain intact after hydrothermal corrosion. As the temperature of the methyltrichlorosilane water bath increases, the average grain size of the coating increases. The coating prepared at a water bath temperature of 50 ℃ has the worst crystallinity and is the most severely corroded.
Key wordsSiC coating    chemical vapor deposition    hydrothermal corrosion    grain size    crystallinity
收稿日期: 2024-04-11      出版日期: 2024-11-18
ZTFLH:  TB332  
通讯作者: 陈昭科,教授,博士。电话:13187015470;E-mail: chenzhaoke2008@csu.edu.cn   
引用本文:   
毛健, 陈招科, 徐振男, 熊翔. 化学气相沉积SiC涂层的制备及水热腐蚀行为[J]. 粉末冶金材料科学与工程, 2024, 29(5): 373-383.
MAO Jian, CHEN Zhaoke, XU Zhennan, XIONG Xiang. Preparation and hydrothermal corrosion behavior of SiC coating by chemical vapor deposition. Materials Science and Engineering of Powder Metallurgy, 2024, 29(5): 373-383.
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http://pmbjb.csu.edu.cn/CN/10.19976/j.cnki.43-1448/TF.2024034     或     http://pmbjb.csu.edu.cn/CN/Y2024/V29/I5/373
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