Preparation and properties of SiC coating on inner surface of Zr-cladding by PECVD at low temperature
TAN Ruixuan1, WANG Honglei1, YU Jinshan1, LI Huailin2, LIU Yanhong2, FAN Zheqiong3, LU Leiwen3, ZHOU Xingui1
1. College of Aerospace Science and Engineering, National University of Defense Technology, Changsha 410083, China; 2. Academy of Science and Technology Company Limited of State Power Investment Corporation, Beijing 100000, China; 3. College of Materials Science and Engineering, Changsha University of Science and Technology, Changsha 410114, China
Abstract：A new and convenient plasma enhanced chemical vapor deposition (PECVD) method was proposed for the preparation of SiC coating with thickness of 3 μm and 5 μm respectively on the inner wall of slender Zr-alloy clad tube (outer diameter 9.5 mm, wall thickness 0.57 mm, length 200 mm). The microstructure of the coating was characterized by SEM and the properties of resistance to thermal shock and high temperature water vapor were tested. The results show that SiC can be deposited on inner surface of clad tube rapidly and effectively by PECVD. The prepared SiC coating is smooth, flat and dense, and the thickness of the coating is uniform no matter in the axial or radial direction of clad tube. The bonding between the SiC coating and Zr-alloy substrate is good enough to withstand high temperature quenching and water vapor oxidation at 1 200 ℃ without exfoliation. The SiC coating can effectively insulate Zr-alloy from high temperature water vapor, and protect Zr-alloy clad tube from oxidation.
谭瑞轩, 王洪磊, 余金山, 李怀林, 刘艳红, 樊哲琼, 卢蕾文, 周新贵. 锆合金包壳管内壁SiC涂层的PECVD制备与性能[J]. 粉末冶金材料科学与工程, 2020, 25(3): 206-212.
TAN Ruixuan, WANG Honglei, YU Jinshan, LI Huailin, LIU Yanhong, FAN Zheqiong, LU Leiwen, ZHOU Xingui. Preparation and properties of SiC coating on inner surface of Zr-cladding by PECVD at low temperature. Materials Science and Engineering of Powder Metallurgy, 2020, 25(3): 206-212.
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2020, Vol. 25 
