占空比对多弧离子镀TiAlN涂层表面形貌和性能的影响

摘要
图/表
参考文献
相关文章 (5)

全文: PDF (1029 KB) HTML (1 KB)
输出: BibTeX | EndNote (RIS)

摘要采用多弧离子镀技术在不同的占空比条件下于锆合金表面制备TiAlN涂层。利用扫描电子显微镜观察涂层的表面和截面微观形貌;利用能谱分析涂层的表面元素成分;利用箱式电阻炉测试涂层在800 ℃空气中持续进行3 h的高温氧化性能;利用自动划痕仪在常温下测试涂层的膜基结合力;利用X射线衍射仪分析涂层的物相组成。结果表明：占空比可显著影响TiAlN涂层的表面和截面的微观形貌、元素成分比例、高温抗氧化性、膜基结合力及物相组成。随占空比增大,TiAlN涂层表面的大颗粒数目减少,表面质量得到改善,涂层的沉积速率先增大后减少,致密性一直增加;能谱分析表明Al元素与Ti元素质量比逐渐减小,Al元素与Ti元素的质量比值最大为2.437;占空比为50%时所制备涂层的高温抗氧化性能最好,膜基结合力最大,为32 N;占空比为30%时,TiAlN涂层中Ti₃AlN表现出(111)晶面、AlN在(100)晶面择优取向,随占空比增加,物相无择优取向现象。以50%占空比的工艺参数镀TiAlN涂层表面质量较好,膜基结合力较强,高温抗氧化性能优良。

	服务

	把本文推荐给朋友
	加入我的书架
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	周军
	李涛
	樊湘芳
	李怀林

关键词 ：多弧离子镀, 占空比, TiAlN涂层, 表面形貌, 膜基结合力, 高温抗氧化性, 物相组成

Abstract：TiAlN coatings were deposited on the surface of zirconium alloys by multi-arc ion plating with different duty ratio. The surface and cross-sectional micro-morphologies were observed by scanning electron microscopy (SEM), the elemental composition of the coatings was analyzed by an energy dispersive spectroscopy (EDS). The high temperature oxidation resistance performance of coatings was tested by a box-type resistance furnace in air at 800 ℃ for 3 h. The adhesion strength of the coating to the substrate was tested by an automatic scratch tester. The phase composition was analyzed by X-ray diffractometer (XRD). The results show that the change of duty ratio can significantly affect the micro-morphology, high temperature oxidation resistance performance, adhesion strength and elemental composition of TiAlN coatings. With the duty ratio increasing, the quantity of large particles on TiAlN coatings decreases gradually, and the quality of surface morphology improves. The deposition rate increases first and then decreases, and the density keeps increasing. EDS analyses show that the mass ratio of Ti and Al elements is gradually reduced, the biggest value is 2.437. With the duty ratio of 50%, the coating has better high temperature oxidation resistance and the higher adhesion strength of 26 N. With the duty ratio of 30%, TiAlN coatings contain Ti₃AlN and AlN phases, and the (111) plane of Ti₃AlN and (100) plane of AlN are the preferred planes. With increasing duty ratio, there are no preferred orientation behavior. As the duty ratio is 50%, the TiAlN coating has better surface, quality higher adhesion strength between the coating and substrate and high temperature oxidation resistance performance.

Key words： multi-arc ion plating duty ratio TiAlN coating surface morphology adhesion strength between coating and substrate high temperature oxidation resistance phase composition

收稿日期: 2017-11-09 出版日期: 2019-07-12

ZTFLH:

TG146.4⁺14

基金资助:国家科技重大专项子课题项目(2015ZX06004001-002-002); 湖南省教育厅重点实验室创新平台开放基金项目(16K076)

通讯作者: 樊湘芳, 教授,硕士。电话：17773435311;E-mail: hefanyibang@163.com

引用本文:

周军, 李涛, 樊湘芳, 李怀林. 占空比对多弧离子镀TiAlN涂层表面形貌和性能的影响[J]. 粉末冶金材料科学与工程, 2018, 23(3): 328-334.
ZHOU Jun, LI Tao, FAN Xiangfang, LI Huailin. Effect of duty ratio on surface morphology and performance of TiAlN coatings deposited by multi-arc ion plating. Materials Science and Engineering of Powder Metallurgy, 2018, 23(3): 328-334.

链接本文:

http://pmbjb.csu.edu.cn/CN/ 或 http://pmbjb.csu.edu.cn/CN/Y2018/V23/I3/328

[1] 王均涛, 刘平, 李伟, 等. TiA1N硬质涂层的研究进展[J]. 热加工工艺, 2010, 39(20): 104-109.
WANG Juntao, LIU Ping, LI Wei, et al.Research progress of TiA1N hard coating[J]. Hot Working Technology, 2010, 39(20): 104-109.
[2] 韩振威, 林有希. TiAlN涂层刀具研究新进展[J]. 组合机床与自动化加工技术, 2012, 460(6): 87-91.
HAN Zhenwei, LIN Youxi.Research progress of TiA1N coating tools[J]. Modular Machine Tool & Automatic Manufacturing Technique, 2012, 460(6): 87-91.
[3] 杨忠波, 赵文金. 锆合金耐腐蚀性能及氧化特性概述[J]. 材料导报, 2010, 24(17): 120-125.
YANG Zhongbo, ZHAO Wenjin.Review of corrosion and oxide characterization for Zr alloys[J]. Materials Review, 2010, 24(17): 120-125.
[4] 杨红艳, 张瑞谦, 彭小明, 等. 锆合金包壳表面涂层研究进展[J]. 表面技术, 2017, 46(1): 69-77.
YANG Hongyan, ZHANG Ruiqian, PENG Xiaoming, et al.Research progress regarding surface coating of zirconium alloy cladding[J]. Surface Technology, 2017, 46(1): 69-77.
[5] 柏广海, 陈志林, 张晏玮, 等. 核燃料包壳锆合金表面涂层研究进展[J]. 稀有金属材料与工程, 2017, 46(7): 2035-2040.
BAI Guanghai, CHEN Zhilin, ZHANG Yanwei, et al.Research progress of coating on zirconium alloy for nuclear fuel cladding[J]. Rare Metal Materials and Engineering, 2017, 46(7): 2035-2040.
[6] KUPRIN A S, BELOUS V А, VOYEVODIN V N, et al.Vacuum-arc chromium-based coatings for protection of zirconium alloys from the high-temperature oxidation in air[J]. Journal of Nuclear Materials, 2015, 465: 400-406.
[7] JIN D, YANG F, ZOU Z, et al.A study of the zirconium alloy protection by Cr3C2-NiCr coating for nuclear reactor application[J]. Surface & Coatings Technology, 2016, 287: 55-60.
[8] PARK J H, KIM H G, PARK J Y, et al.High temperature steam-oxidation behavior of arc ion plated Cr coatings for accident tolerant fuel claddings[J]. Surface & Coatings Technology, 2015, 280: 256-259.
[9] KIM H G, KIM I H, JUNG Y I, et al.Adhesion property and high-temperature oxidation behavior of Cr-coated Zircaloy-4 cladding tube prepared by 3D laser coating[J]. Journal of Nuclear Materials, 2015, 465: 531-539.
[10] KOO Y H, YANG J H, PARK J Y, et al.KAERI’s Development of LWR accident-tolerant fuel[J]. Nuclear Technology, 2014, 186(2): 295-304.
[11] MAIER B R, GARCIA-DIAZ B L, HAUCH B, et al. Cold spray deposition of Ti₂AlC coatings for improved nuclear fuel cladding[J]. Journal of Nuclear Materials, 2015, 466: 712-717.
[12] KIM I, KHATKHATAY F, JIAO L, et al.TiN-based coatings on fuel cladding tubes for advanced nuclear reactors[J]. Journal of Nuclear Materials, 2012, 429(1/3): 143-148.
[13] YAN S, LIU X, CHEN W, et al.Characteristics of coating on surface of ZrH_1.8 prepared by MAO in different electrolyte system[J]. Chinese Journal of Rare Metals, 2014, 38(4): 646-652.
[14] SHAN Lei, WANG Yongxin, LI Jinlong, et al.Structure and mechanical properties of thick Cr/Cr₂N/CrN multilayer coating deposited by muti-arc ion plating[J]. Science Direct, 2015, 25(4): 1135-1143.
[15] ZHAO Yanhui, GUO Chaoqian, YANG Wenjin, et al.TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating[J]. Vacuum, 2015, 112: 46-54.
[16] 曾小安, 邱长军, 张文, 等. 占空比对多弧离子镀纯Cr涂层表面形貌的影响[J]. 金属热处理, 2017, 42(4): 172-174.
ZENG Xiao’an, QIU Changjun, ZHANG Wen, et al.Influence of duty cycle on surface morphology of pure Cr coatings deposited by multi-arc ion plating[J]. Heat Treatment of Metals, 2017, 42(4): 172-174.
[17] 魏永强, 刘建伟, 文振华, 等. 脉冲偏压占空比和放置状态对大颗粒分布规律的影响[J]. 热加工工艺, 2015, 44(4): 134-137.
WEI Yongqiang, LIU Jianwei, WEN Zhenhua, et al.Influence of pulsed bias duty cycle and placement state on distribution rule of macroparticles[J]. Hot Working Technology, 2015, 44(4): 134-137.
[18] 程芳, 黄美东, 王萌萌, 等. 脉冲偏压占空比对复合离子镀TiCN涂层结构和性能的影响[J]. 中国表面工程, 2014, 27(4): 100-106.
CHENG Fang, HUANG Meidong, WANG Mengmeng, et al.Effects of duty-ratio of pulsed bias on the structure and properties of TiCN coatings by hybrid ion plating[J]. China Surface Technology, 2014, 27(4): 100-106.
[19] 孙智慧, 钱锋, 肖玮, 等. 占空比对磁控溅射TiAlN薄膜性能影响的实验研究[J]. 真空, 2014, 51(6): 25-27.
SUN Zhihui, QIAN Feng, XIAO Wei, et al.The experimental study on the influence of duty cycle on TiA1N films’ characteristics deposited by magnetron sputtering[J]. Vacuum, 2014, 51(6): 25-27.
[20] 熊仁章, 夏立芳, 雷廷权. 工艺因素对TiA1N多元涂层成分的影响[J]. 兵器材料科学与工程, 2000, 23(5): 55-58.
XIONG Renzhang, XIA Lifang, LEI Tingquan.Effect of process on composition of multi-component TiAlN coating[J]. Ordnance Material Science and Engineering, 2000, 23(5): 55-58.
[21] 梁俊才, 周武平, 张凤戈, 等. TiAlN涂层制备过程中Ti,Al元素存在形式的演变分析[J]. 稀有金属, 2014, 38(4): 561-566.
LIANG Juncai, ZHOU Wuping, ZHANG Fengge, et al.Evolution analysis of existing forms of Ti and A1 elements during preparation of TiA1N coating[J]. Chinese Journal of Rare Mentals, 2014, 38(4): 561-566.
[22] ZHU L, HU M, NI W, et al.High temperature oxidation behavior of Ti_0.5Al_0.5N coating and Ti_0.5Al_0.4Si_0.1N coating[J]. Vacuum, 2012, 86(12): 1795-1799.
[23] 魏永强, 张艳霞, 文振华, 等. 脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响[J]. 表面技术, 2014, 43(1): 1-6.
WEI Yongqiang, ZHANG Yanxia, WEN Zhenhua, et al.Effects of different pulsed bias duty cycle on the microstructure and hardness of TiN/TiA1N multilayer coatings[J]. Surface Technology, 2014, 43(1): 1-6.
[24] 刘燕燕, 白晓, 林国强, 等. 阴极弧电流对TiN及(TiTa)N薄膜结构和性能影响[J]. 大连理工大学学报, 2002, 42(6): 644-648.
LIU Yanyan, BAI Xiao, LIN Guoqiang, et al.Influences of cathode arc current on microstructures and properties of TiN and (TiTa)N coatings[J]. Journal of Dalian University of Technology, 2002, 42(6): 644-648.
[25] 李兆营, 公衍生, 田永尚, 等. 沉积温度对射频磁控溅射TiN薄膜结构和表面形貌的影响[J]. 电镀与涂饰, 2013, 32(12): 39-41.
LI Zhaoying, GONG Yansheng, TIAN Yongshang, et al.Effect of deposition temperature on structure and surface morphology of TiN thin films prepared by radio frequency magnetron sputtering[J]. Electorplating & Finishing, 2013, 32(12): 39-41.
[26] 瞿全炎, 邱万奇, 曾德长, 等. 划痕法综合评定膜基结合力[J]. 真空科学与技术学报, 2009, 29(2): 184-187.
QU Quanyan, QIU Wanqi, ZENG Dezhang, et al.Measurement of TiN film substrate interfacial adhesion by scratching[J]. Chinese Journal of Vacuum Science and Technology, 2009, 29(2): 184-187.
[27] 王萌萌, 黄美东, 潘玉鹏, 等. 脉冲偏压对多弧离子镀TiAlN薄膜的成分和结构的影响研究[J]. 真空, 2015, 52(1): 34-38.
WANG Mengmeng, HUANG Meidong, PAN Yupeng, et al.Effects of pulsed bias on composition and structure of TiA1N films by arc ion plating[J]. Vacuum, 2015, 52(1): 34-38.