离子源辅助电弧离子镀制备MoS<em>x</em>自润滑涂层

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摘要以Ar为输送气体,H₂S为S源,纯金属Mo为Mo源,采用中空阴极弧光离子源结合电弧离子镀系统,在单晶Si(100)和硬质合金衬底上制备MoSx自润滑涂层,系统研究H₂S流量对MoSx自润滑涂层结构及性能的影响,为电弧离子镀技术制备MoSx自润滑涂层积累实验数据。结果表明,H₂S流量对MoSx自润滑涂层的晶体结构、硬度及摩擦因数具有明显影响。随H₂S流量升高,MoSx自润滑涂层中Mo晶粒尺寸逐渐减小,没有明显的硫化物结晶相,MoSx涂层硬度逐渐减小,摩擦因数也逐渐减小,且均小于0.35(对磨材料硬质合金)。H₂S可以作为S源通过中空阴极离子源离化作用为MoSx自润滑涂层的制备提供S元素;电弧离子镀制备出的MoSx自润滑涂层为金属Mo纳米晶粒与非晶MoS、MoS₂组成的纳米复合结构。

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	李助军
	刘怡飞
	田灿鑫
	杨兵
	付德君
	苏峰华

关键词 ：自润滑涂层, 中空阴极弧光离子源, 电弧离子镀, MoSx涂层, 力学性能

Abstract：MoSx self-lubricating coatings was deposited on crystal Si and cemented carbide substrates using Ar, H₂S and metal molybdenum as S and Mo source by arc ion plating, by hollow cathode arc ion source. The effects of H₂S flow rate on microstructure and mechanical properties of the coatings were systemically investigated. The results show that the H₂S flow rate has a significant effect on crystalline structure, micro-hardness and friction coefficient of MoSx coating. With the increase of H₂S flow rate, the grain size of Mo decreases while the content of MoSx increases in the coatings. The microhardness and average friction coefficients decrease with increasing the H₂S flow rate. The average friction coefficients are lower than 0.35 (mating cemented carbide). The H₂S can be used for MoSx self-lubricating coating deposition. The structure of MoSx coatings deposited by arc ion plating is Mo nanocrystalline embedded in MoS, MoS₂ amorphous phase matrix.

Key words： self-lubricating coatings hollow cathode arc ion source arc ion plating MoSx coatings mechanical property

收稿日期: 2017-04-24 出版日期: 2019-07-12

ZTFLH:

TG174.444

基金资助:国家自然科学基金资助项目(11405117); 广东省高等学校优秀青年教师培养项目(YQ2015208); 广州铁路职业技术学院校级项目(10000253,30000261,30000263)

通讯作者: 李助军,副教授,博士。电话：020-86020034;E-mail: lizhujun80@163.com

引用本文:

李助军, 刘怡飞, 田灿鑫, 杨兵, 付德君, 苏峰华. 离子源辅助电弧离子镀制备MoSx自润滑涂层[J]. 粉末冶金材料科学与工程, 2018, 23(2): 186-191.
LI Zhujun, LIU Yifei, TIAN Canxin, YANG Bing, FU Dejun, SU Fenghua. Deposition of MoSx self-lubricating coatings by cathodic arc plating with ion source. Materials Science and Engineering of Powder Metallurgy, 2018, 23(2): 186-191.

链接本文:

http://pmbjb.csu.edu.cn/CN/ 或 http://pmbjb.csu.edu.cn/CN/Y2018/V23/I2/186

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