磁控溅射功率对NiAl涂层成分及显微组织的影响

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Abstract In order to study the chemical composition variation, microstructure evolution and related properties of the coatings caused by sputtering power modulation, the binary Ni-Al alloy coating were prepared by magnetron co-sputtering on the surface of Si(100). The XRD, SEM and TEM were used to study the phase composition and microstructure of the coatings. The result show that the microstructure consisted of a significant crystallization feature of a metastable (Ni,Al) matrix and Ni₃Al precipitations is observed for the coatings under high sputtering powers, the coatings deposited at lower sputtering powers exhibit a (Ni,Al) solid solution polycrystalline structure with preferred orientation. The coatings with (Ni,Al) matrix and Ni₃Al precipitations exhibit a higher hardness than those on the single (Ni,Al) phase. The variation in hardness of the magnetron co-sputtered Ni-Al coatings could be attributed to the grain size and microstructure evolution. The nano-crystallites of (Ni,Al) and Ni₃Al phases in the Ni-Al coatings are obtained under the higher energy input during sputtering. With increasing Al sputtering power, a slight decrease of grain size is observed due to the increase of the Al concentration in the Ni-Al coatings. The change of the hardness of Ni-Al coating can be attributed to the evaluation of the grain size and microstructure.

Key words： Ni-Al alloy sputtering nano-crystalline hardness strengthen in the mechanism

Received: 19 December 2017 Published: 12 July 2019

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Cite this article:

HE Dianmin. Effect of magnetron sputtering power on composition and microstructure of NiAl coating[J]. Materials Science and Engineering of Powder Metallurgy, 2018, 23(3): 335-340.

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http://pmbjb.csu.edu.cn/EN/ OR http://pmbjb.csu.edu.cn/EN/Y2018/V23/I3/335

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