占空比对多弧离子镀TiAlN涂层表面形貌和性能的影响

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Abstract TiAlN coatings were deposited on the surface of zirconium alloys by multi-arc ion plating with different duty ratio. The surface and cross-sectional micro-morphologies were observed by scanning electron microscopy (SEM), the elemental composition of the coatings was analyzed by an energy dispersive spectroscopy (EDS). The high temperature oxidation resistance performance of coatings was tested by a box-type resistance furnace in air at 800 ℃ for 3 h. The adhesion strength of the coating to the substrate was tested by an automatic scratch tester. The phase composition was analyzed by X-ray diffractometer (XRD). The results show that the change of duty ratio can significantly affect the micro-morphology, high temperature oxidation resistance performance, adhesion strength and elemental composition of TiAlN coatings. With the duty ratio increasing, the quantity of large particles on TiAlN coatings decreases gradually, and the quality of surface morphology improves. The deposition rate increases first and then decreases, and the density keeps increasing. EDS analyses show that the mass ratio of Ti and Al elements is gradually reduced, the biggest value is 2.437. With the duty ratio of 50%, the coating has better high temperature oxidation resistance and the higher adhesion strength of 26 N. With the duty ratio of 30%, TiAlN coatings contain Ti₃AlN and AlN phases, and the (111) plane of Ti₃AlN and (100) plane of AlN are the preferred planes. With increasing duty ratio, there are no preferred orientation behavior. As the duty ratio is 50%, the TiAlN coating has better surface, quality higher adhesion strength between the coating and substrate and high temperature oxidation resistance performance.

Key words： multi-arc ion plating duty ratio TiAlN coating surface morphology adhesion strength between coating and substrate high temperature oxidation resistance phase composition

Received: 09 November 2017 Published: 12 July 2019

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TG146.4⁺14

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	ZHOU Jun
	LI Tao
	FAN Xiangfang
	LI Huailin

Cite this article:

ZHOU Jun,LI Tao,FAN Xiangfang, et al. Effect of duty ratio on surface morphology and performance of TiAlN coatings deposited by multi-arc ion plating[J]. Materials Science and Engineering of Powder Metallurgy, 2018, 23(3): 328-334.

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http://pmbjb.csu.edu.cn/EN/ OR http://pmbjb.csu.edu.cn/EN/Y2018/V23/I3/328

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