离子源辅助电弧离子镀制备MoS<em>x</em>自润滑涂层

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Abstract MoSx self-lubricating coatings was deposited on crystal Si and cemented carbide substrates using Ar, H₂S and metal molybdenum as S and Mo source by arc ion plating, by hollow cathode arc ion source. The effects of H₂S flow rate on microstructure and mechanical properties of the coatings were systemically investigated. The results show that the H₂S flow rate has a significant effect on crystalline structure, micro-hardness and friction coefficient of MoSx coating. With the increase of H₂S flow rate, the grain size of Mo decreases while the content of MoSx increases in the coatings. The microhardness and average friction coefficients decrease with increasing the H₂S flow rate. The average friction coefficients are lower than 0.35 (mating cemented carbide). The H₂S can be used for MoSx self-lubricating coating deposition. The structure of MoSx coatings deposited by arc ion plating is Mo nanocrystalline embedded in MoS, MoS₂ amorphous phase matrix.

Key words： self-lubricating coatings hollow cathode arc ion source arc ion plating MoSx coatings mechanical property

Received: 24 April 2017 Published: 12 July 2019

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TG174.444

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	Articles by authors
	LI Zhujun
	LIU Yifei
	TIAN Canxin
	YANG Bing
	FU Dejun
	SU Fenghua

Cite this article:

LI Zhujun,LIU Yifei,TIAN Canxin, et al. Deposition of MoSx self-lubricating coatings by cathodic arc plating with ion source[J]. Materials Science and Engineering of Powder Metallurgy, 2018, 23(2): 186-191.

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http://pmbjb.csu.edu.cn/EN/ OR http://pmbjb.csu.edu.cn/EN/Y2018/V23/I2/186

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