硬质合金晶粒度对其表面金刚石涂层的影响

花腾宇; 夏鑫; 马莉; 魏秋平; 石鹏程

doi:10.19976/j.cnki.43-1448/TF.2023013

粉末冶金材料科学与工程 >

2023 , Vol. 28 >Issue 2: 180 - 191

DOI: https://doi.org/10.19976/j.cnki.43-1448/TF.2023013

工艺技术

硬质合金晶粒度对其表面金刚石涂层的影响

花腾宇 ,
夏鑫 ,
马莉 ,
魏秋平 ,
石鹏程

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1.中南大学粉末冶金国家重点实验室,长沙 410083;
2.中南大学材料科学与工程学院,长沙 410083;
3.中国科学院西安光学精密机械研究所空间科学微光探测技术研究室;西安 710119;
4.中国科学院大学光电学院,北京 100049

收稿日期: 2023-03-04

修回日期: 2023-03-20

网络出版日期: 2023-05-04

基金资助

“十四五”国家重点研发计划资助项目(2021YFB3701800); 国家自然科学基金资助项目(52202056、52274370、52071345); 广东省“十三五”规划重点研究开发项目(2020B01085001); 湖南省高新技术产业科技创新引领计划资助项目(2022GK4037、2022GK4047); 粉末冶金国家重点实验室自主课题(621022230)与开放课题

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Effect of cemented carbide grain size on diamond coating

HUA Tengyu ,
XIA Xin ,
MA Li ,
WEI Qiuping ,
SHI Pengcheng

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1. State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China;
2. School of Materials Science and Engineering, Central South University, Changsha 410083, China;
3. Laboratory of Space Science and Low-light Detection Technology, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China;
4. College of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

Received date: 2023-03-04

Revised date: 2023-03-20

Online published: 2023-05-04

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摘要

采用热丝化学气相沉积法在不同晶粒度(0.4、0.6、1.0和2.0 μm)的YG6硬质合金表面沉积硼掺杂金刚石涂层,通过扫描电镜、X射线衍射仪、拉曼光谱仪及洛氏硬度计对金刚石涂层的形貌、结构、成分、结合性能等进行分析,研究硬质合金晶粒度对金刚石涂层生长和结合性能的影响。结果表明,随硬质合金的晶粒度从0.4 μm增大到2.0 μm,金刚石的晶粒尺寸逐渐增大且均匀性更好,金刚石拉曼峰和石墨拉曼峰的峰强比(I_D/I_G)从4.74增加到6.53。膜基结合性能与涂层的内应力、金刚石的半峰宽之间都有较好的相关性,均受基体合金晶粒错配度的影响,涂层的内应力还受掺硼的影响。当硬质合金晶粒度为2.0 μm时,金刚石涂层的I_D/I_G比值最大,为6.53;涂层的内应力最小,仅为1.588 GPa;膜基结合性能最优,在600 N压力下达到HF1级。

关键词： 化学气相沉积; 金刚石涂层; 硬质合金; 晶粒度; 结合性能

本文引用格式

花腾宇 , 夏鑫 , 马莉 , 魏秋平 , 石鹏程 . 硬质合金晶粒度对其表面金刚石涂层的影响[J]. 粉末冶金材料科学与工程, 2023 , 28(2) : 180 -191 . DOI: 10.19976/j.cnki.43-1448/TF.2023013

Abstract

Boron-doped diamond coatings were deposited on YG6 cemented carbide substrates with different grain sizes (0.4, 0.6, 1.0 and 2.0 μm) by hot wire chemical vapor deposition. The morphology and composition of the cemented carbide substrates were characterized, and the morphology, structure, composition and adhesion of the diamond coating were also analyzed by scanning electron microscope, X-ray diffraction, Raman spectroscopy and Rockwell hardness tester. The effects of grain size of cemented carbide substrates on the growth and adhesion properties of diamond coatings were studied and compared. The results show that with the grain size of cemented carbide increasing from 0.4 μm to 2.0 μm, the grain size of diamond gradually increases and its uniformity is better. The peak intensity ratio (I_D/I_G) of diamond and graphite Raman peaks increases from 4.74 to 6.53. There is a good correlation between the film substrate bonding performance and the internal stress of the coating, as well as the half peak width of diamond, which are affected by the grain mismatch of the matrix alloy, while the internal stress of the coating is also affected by boron doping. When the cemented carbide grain size is 2.0 μm, the diamond coating has the maximum I_D/I_G ratio of 6.53. The internal stress of diamond coating is also the lowest, which is only 1.588 GPa. And the film-substrates adhesion is optimal that can reach the HF1 level under the pressure of 600 N.

Key words： chemical vapor deposition; diamond coating; cemented carbide; grain size; adhesion property

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