利用C2H2和Si靶,通过等离子体增强化学气相沉积(plasma enhanced chemical vapor deposition, PECVD)和磁控溅射法,在Ti-6Al-4V(TC4)合金表面沉积类金刚石(diamond-like carbon, DLC)膜层和不同Si含量的Si-DLC膜层。利用拉曼光谱和X射线光电子能谱分析膜层中的键合含量和结构无序性;采用纳米压痕和纳米划痕法测试TC4合金及其膜层试样的力学性能;使用HT-1000高温摩擦磨损测试仪和光学轮廓仪测试TC4合金及其膜层试样的摩擦磨损性能。结果表明：无论是否含Si元素,DLC膜层都能够有效提高TC4基体表面硬度,其中沉积纯DLC膜层后TC4基体的硬度相比无涂层提升了2.4倍,提升率最大;纯DLC和Si的摩尔分数分别为1.79%和3.06%的2种Si-DLC膜层,都可使TC4基体的表面摩擦因数从无涂层的0.64降低至0.1左右,磨损率从无涂层的476.5×10-7 mm3/(N∙m)降低至0.5×10-7 mm3/(N∙m)左右,表明这3种膜层都有助于提升TC4基体表面的耐磨性能。
Diamond-like layers and Si-DLC layers with different Si contents on the surface of Ti-6Al-4V (TC4) alloys were fabricated by plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering using C2H2 and Si targets. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) measurement were used to analyze the bonding content and structural disorder of different films. The mechanical properties of the TC4 alloy and the films deposited were measured by the method of nanoindentation and nano-scratch. The HT-1000 high-temperature friction and wear tester and optical profiler were used to measure the frictional wear properties. The results show that regardless of whether there is Si element in the DLC layer, the surface hardness of TC4 substrate can be effectively improved. The hardness of the pure DLC film layer is 2.4 times higher than that of the uncoated TC4, and the improvement rate is the largest among the four films. Pure DLC and two kinds of Si-DLC films with mole fractions of Si of 1.79% and 3.06% respectively, all can reduce the surface friction coefficient of TC4 substrate from 0.64 without coating to about 0.1 and the wear rate is also reduced from 476.5×10-7 mm3/(N·m) to about 0.5×10-7 mm3/(N·m), indicating that three kinds of coatings are helpful to improve the wear resistance of the TC4 substrate surface.
[1] KOIZUMI H, TAKEUCHI Y, IMAI H, et al.Application of titanium and titanium alloys to fixed dental prostheses[J]. Journal of Neurosurgical Sciences, 2019, 63(3): 266-270.
[2] CAI D, ZHAO X, YANG L, et al.A novel biomedical titanium alloy with high antibacterial property and low elastic modulus[J]. Journal of Materials Science & Technology, 2021, 81: 13-25.
[3] KIRMANIDOU Y, SIDIRA M, DROSOU M E, et al.New Ti-alloys and surface modifications to improve the mechanical properties and the biological response to orthopedic and dental implants: a review[J]. Biomed Research International, 2016, 2016(2): 2908570.
[4] BAI L C, ZHANG G G, LU Z B, et al.Tribological mechanism of hydrogenated amorphous carbon film against pairs: a physical description[J]. Journal of Applied Physics, 2011, 110(3): 033521.
[5] THOMSON L A, LAW F C, RUSHTON N, et al.Biocompatibility of diamond-like carbon coating[J]. Biomaterials, 1991, 12(1): 37-40.
[6] MARTINS P S, ALMEIDA MAGALHãES JúNIOR P A, GONÇALVES CARNEIRO J R, et al. Study of diamond-like carbon coating application on carbide substrate for cutting tools used in the drilling process of an Al-Si alloy at high cutting speeds[J]. Wear, 2022, 498-499: 204326.
[7] PILLACA E J D M, RAMíREZ M A, GUTIERREZ BERNAL J M, et al. DLC deposition inside of a long tube by using the pulsed-DC PECVD process[J]. Surface and Coatings Technology, 2019, 359: 55-61.
[8] THUKKARAM M, VAIDULYCH M, KYLIáN O, et al. Investigation of Ag/a-C:H nanocomposite coatings on titanium for orthopedic applications[J]. ACS Applied Materials & Interfaces, 2020, 12(21): 23655-23666.
[9] WANG J, PU J, ZHANG G, et al.Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content[J]. Surface and Coatings Technology, 2013, 235: 326-332.
[10] YU W, HUANG W, WANG J, et al.Compositional design of diamond-like carbon film for tribological performance at elevated temperature: Si and W co-doping[J]. Journal of Non-Crystalline Solids, 2022, 576: 121281.
[11] ZHAO Y, XU F, ZHANG D, et al.Enhanced tribological and corrosion properties of DLC/CrN multilayer films deposited by HPPMS[J]. Ceramics International, 2022, 48(17): 25569-25577.
[12] YI S, CHEN X, LI J, et al.Macroscale superlubricity of Si-doped diamond-like carbon film enabled by graphene oxide as additives[J]. Carbon, 2021, 176: 358-366.
[13] SRISANG C, ASANITHI P, SIANGCHAEW K, et al.Formation of SiC in DLC/a-Si films as characterized by raman spectroscopy and XPS[J]. Journal of Physics: Conference Series, 2013, 417: 012046.
[14] GUO C Q, LIN S S, GAO D, et al.Modulation of Si on microstructure and tribo-mechanical properties of hydrogen- free DLC films prepared by magnetron sputtering[J]. Applied Surface Science, 2020, 509: 145381.
[15] CHARITIDIS C A, LOGOTHETIDIS S.Effects of normal load on nanotribological properties of sputtered carbon nitride films[J]. Diamond and Related Materials, 2005, 14(1): 98-108.
[16] ZHOU Y, LI L, HU T, et al.Role of TiC nanocrystalline and interface of TiC and amorphous carbon on corrosion mechanism of titanium doped diamond-like carbon films: exploration by experimental and first principle calculation[J]. Applied Surface Science, 2021, 542: 148740.
[17] BOCIAGA D, SOBCZYK-GUZENDA A, SZYMANSKI W, et al.Mechanical properties, chemical analysis and evaluation of antimicrobial response of Si-DLC coatings fabricated on AISI 316 LVM substrate by a multi-target DC-RF magnetron sputtering method for potential biomedical applications[J]. Applied Surface Science, 2017, 417: 23-33.
[18] LEYLAND A, MATTHEWS A.On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour[J]. Wear, 2000, 246(1/2): 1-11.
[19] WEI X, SHI S, NING C, et al.Si-DLC films deposited by a novel method equipped with a co-potential auxiliary cathode for anti-corrosion and anti-wear application[J]. Journal of Materials Science & Technology, 2022, 109: 114-128.
[20] CAI J B, WANG X L, BAI W Q, et al.Bias-graded deposition and tribological properties of Ti-contained a-C gradient composite film on Ti6Al4V alloy[J]. Applied Surface Science, 2013, 279: 450-457.
[21] ZHANG L, LONG W, DU D, et al.The microstructure and wear properties of diamond composite coatings on TC4 made by induction brazing[J]. Diamond and Related Materials, 2022, 125: 109032.
[22] WEICHENG K, ZHOU Y, JUN H.Effect of carburizing treatment on microstructural, mechanical and tribological performances of Cr doped DLC coating deposited on Ti6Al4V alloy[J]. Ceramics International, 2021, 47(24): 34425-34436.
