化学气相沉积SiC涂层的制备及水热腐蚀行为

doi:10.19976/j.cnki.43-1448/TF.2024034

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Abstract SiC coating was prepared on high-purity graphite using chemical vapor deposition method, and hydrothermal corrosion experiment was conducted to study the relationship between chemical vapor deposition process, coating morphology and structure, and coating hydrothermal corrosion behavior. The results show that with the increase of dilution hydrogen flow rate, the average grain size of the coating decreases, the possibility of free Si appearing in the coating increases, and the resistance to hydrothemal corrosion gradually decreases. As the deposition temperature increases from 1 000 ℃ to 1 300 ℃, the crystallinity and average grain size of the coating first increases and then decreases. The maximum value is obtained at a deposition temperature of 1 200 ℃, and the coating structure and grain morphology remain intact after hydrothermal corrosion. As the temperature of the methyltrichlorosilane water bath increases, the average grain size of the coating increases. The coating prepared at a water bath temperature of 50 ℃ has the worst crystallinity and is the most severely corroded.

Key words： SiC coating chemical vapor deposition hydrothermal corrosion grain size crystallinity

Received: 11 April 2024 Published: 18 November 2024

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	MAO Jian
	CHEN Zhaoke
	XU Zhennan
	XIONG Xiang

Cite this article:

MAO Jian,CHEN Zhaoke,XU Zhennan, et al. Preparation and hydrothermal corrosion behavior of SiC coating by chemical vapor deposition[J]. Materials Science and Engineering of Powder Metallurgy, 2024, 29(5): 373-383.

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http://pmbjb.csu.edu.cn/EN/10.19976/j.cnki.43-1448/TF.2024034 OR http://pmbjb.csu.edu.cn/EN/Y2024/V29/I5/373

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