锆合金包壳管内壁SiC涂层的PECVD制备与性能

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Abstract A new and convenient plasma enhanced chemical vapor deposition (PECVD) method was proposed for the preparation of SiC coating with thickness of 3 μm and 5 μm respectively on the inner wall of slender Zr-alloy clad tube (outer diameter 9.5 mm, wall thickness 0.57 mm, length 200 mm). The microstructure of the coating was characterized by SEM and the properties of resistance to thermal shock and high temperature water vapor were tested. The results show that SiC can be deposited on inner surface of clad tube rapidly and effectively by PECVD. The prepared SiC coating is smooth, flat and dense, and the thickness of the coating is uniform no matter in the axial or radial direction of clad tube. The bonding between the SiC coating and Zr-alloy substrate is good enough to withstand high temperature quenching and water vapor oxidation at 1 200 ℃ without exfoliation. The SiC coating can effectively insulate Zr-alloy from high temperature water vapor, and protect Zr-alloy clad tube from oxidation.

Key words： Zr-alloy cladding SiC coating PECVD thermal shock resistance corrosion resistance to high temperature steam

Received: 10 January 2020 Published: 11 August 2020

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	Articles by authors
	TAN Ruixuan
	WANG Honglei
	YU Jinshan
	LI Huailin
	LIU Yanhong
	FAN Zheqiong
	LU Leiwen
	ZHOU Xingui

Cite this article:

TAN Ruixuan,WANG Honglei,YU Jinshan, et al. Preparation and properties of SiC coating on inner surface of Zr-cladding by PECVD at low temperature[J]. Materials Science and Engineering of Powder Metallurgy, 2020, 25(3): 206-212.

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http://pmbjb.csu.edu.cn/EN/ OR http://pmbjb.csu.edu.cn/EN/Y2020/V25/I3/206

[1] 王旭峰, 李中奎, 周军, 等. 锆合金在核工业中的应用及研究进展[J]. 热加工工艺, 2012, 41: 71-74.
WANG Xufeng, LI Zhongkui, ZHOU Jun, et al.Application and research progress of zirconium alloy in nuclear industry[J]. Material & Heat Treatment, 2012, 41: 71-74.
[2] 杨忠波. 国外锆合金研究发展概况[J]. 中国核工业, 2016, 10: 40-41.
YANG Zhongbo.Development situation of zirconium alloy aboard[J]. China Nuclear Industry, 2016, 10: 40-41.
[3] 周军, 李中奎. 轻水反应堆(LWR)用包壳材料研究进展[J]. 中国材料进展, 2014, 33(9/10): 554-559.
ZHOU Jun, LI Zhongkui.Research progress on cladding materials used for light water reactor[J]. Materials China, 2014, 33(9/10): 554-559.
[4] PIRO M H, SUNDERLAND D, LIVINGSTONE S, et al.A review of pellet-clad interaction behavior in zirconium alloy fuel cladding[J]. Reference Module in Materials Science and Materials Engineering, 2017: 1-61.
[5] 魏晓伟, 沈保罗. 核反应堆中防护包壳的研究进展[J]. 稀有金属, 2002, 26(4): 304-306.
WEI Xiaowei, SHEN Baoluo.Development of research on protective zircaloy cladding in nuclear reactor[J]. Chinese Journal of Rare Metals, 2002, 26(4): 304-306.
[6] HASEGAWA A, KOHYAMA A, JONES R H.et al. Critical issues and current status of SiC/SiC composites for fusion[J]. Journal of Nuclear Materials, 2000, 283/287(Part 1): 128-137.
[7] 刘荣正, 刘马林, 邵友林, 等. 碳化硅材料在核燃料元件中的应用[J]. 材料导报A, 2015, 29(1): 1-5.
LIU Rongzheng, LIU Malin, SHAO Youlin.et al.Application of silicon carbide in nuclear fuel elements[J]. Materials Review A, 2015, 29(1): 1-5.
[8] QI Z, LÜ X X, ZHAO W Q, et al.BN/SiC coating on SiC tows prepared by chemical vapor infiltration[J]. IOP Conference Series: Materials Science and Engineering, 2019, 678(1): 012-062.
[9] AL-OLAYYAN Y, FUCHS G E, BANEY R, et al.The effect of Zircaloy-4 substrate surface condition on the adhesion strength and corrosion of SiC coatings[J]. Journal of Nuclear Materials, 2005, 346(2/3): 109-119.
[10] 郑新海, 尹邦跃, 吴学志. 锆合金包壳水侧SiC涂层研究[J]. 原子能科学技术, 2019, 53(6): 1085-1090.
ZHENG Xinhai, YIN Bangyue, WU Xuezhi.Study on SiC coating on waterside of zirconium alloy cladding[J]. Atomic Energy Science and Technology, 2019, 53(6): 1085-1090.
[11] ENSINGER W, LENSCH O, KRAUS T, et al.Coating the inner walls of metal tubes with carbon films by physical vapor deposition at low temperature[J]. Surface and Coating Technology, 2002, 150(2): 227-231.
[12] FUJIYAMA H.Inner coating of long-narrow tube by plasma sputtering[J]. Surfae and Coating Technology, 2000, 131(1/3): 278-283.
[13] LAVKNER J M, KAHN M, WALDHAUSER W.Plasma modification and deposition on inner tube faces by pulsed DC discharges[J]. Vacuum, 2011, 86:144-150.
[14] OHGOE Y, KANASUGI K, HOMMA A, et al.Amorphous hydrogenated carbon (a-C:H) film coating on an inner-wall of cylindrical textile materials by R. F. CVD[J]. Diamond & Related Materials, 2008, 17(7/10): 1702-1705.
[15] LANG W C. Process development of films deposited on inner wall of long tube by arc ion plating[J]. Applied Mechanics and Materials, 2012, 152/154: 1705-1710.
[16] KOUSAKA H, MORI K, UMEHARA N, et al.Internal DLC coating of narrow metal tubes using high-density near plasma sustained by microwaves propagation along plasma sheath interfaces[J]. Surface and Coating Technology, 2013, 229: 65-70.
[17] 郭辉, 王煜, 张海霞, 等. PECVD SiC薄膜的应力控制及抗腐蚀特性研究[J]. 中国机械工程, 2005, 16(21): 346-348.
GUO Hui, WANG Yu, ZHANG Haixia, et al.Stress control and anti-erosion characteristics of PECVD SiC thin film[J]. China Mechanical Engineering, 2005, 16(21): 346-348.