半导体表面化学沉积制备WO<sub>3</sub>-TiO<sub>2</sub>薄膜的组织及电化学性能

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Abstract Nano WO₃-TiO₂ films for semiconductors were prepared by chemical deposition with different end capping agents (SDBS or PEG), and their electrochromic properties were characterized. The results show that there is a large gap between the adjacent wafers of WO₃-TiO₂ thin film with SDBS, forming many cracks and agglomeration of particles. All the WO₃-TiO₂ thin film samples show short wave shift in the transmission spectrum under the colored condition. There is no significant change in the transmittance of the pigmented and faded WO₃-TiO₂ films with PEG. Better discoloration effect can be obtained when SDBS is selected as film Terminator. At the same time, the WO₃-TiO₂ film prepared with SDBS as the terminator has a higher current density than the WO₃-TiO₂ film prepared with PEG as the terminator. More ion implantation can be obtained, and the stability of film coloring and fading current is better.

Key words： WO₃-TiO₂ films chemical solution deposition electrochromic ion diffusion

Received: 28 May 2019 Published: 19 June 2020

ZTFLH:	TG174.4
	TB43

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	WANG Zhongli
	JU Aiyun

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WANG Zhongli,JU Aiyun. Microstructure and electrochemical properties of WO₃-TiO₂ thin films prepared by chemical deposition on semiconductor surface[J]. Materials Science and Engineering of Powder Metallurgy, 2019, 24(6): 503-507.

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http://pmbjb.csu.edu.cn/EN/ OR http://pmbjb.csu.edu.cn/EN/Y2019/V24/I6/503

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