掺硅非晶碳薄膜对TC4摩擦磨损性能的影响

doi:10.19976/j.cnki.43-1448/TF.2022095

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Abstract Diamond-like layers and Si-DLC layers with different Si contents on the surface of Ti-6Al-4V (TC4) alloys were fabricated by plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering using C₂H₂ and Si targets. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) measurement were used to analyze the bonding content and structural disorder of different films. The mechanical properties of the TC4 alloy and the films deposited were measured by the method of nanoindentation and nano-scratch. The HT-1000 high-temperature friction and wear tester and optical profiler were used to measure the frictional wear properties. The results show that regardless of whether there is Si element in the DLC layer, the surface hardness of TC4 substrate can be effectively improved. The hardness of the pure DLC film layer is 2.4 times higher than that of the uncoated TC4, and the improvement rate is the largest among the four films. Pure DLC and two kinds of Si-DLC films with mole fractions of Si of 1.79% and 3.06% respectively, all can reduce the surface friction coefficient of TC4 substrate from 0.64 without coating to about 0.1 and the wear rate is also reduced from 476.5×10^-7mm³/(N·m) to about 0.5×10^-7mm³/(N·m), indicating that three kinds of coatings are helpful to improve the wear resistance of the TC4 substrate surface.

Key words： titanium alloy diamond-like carbon tribological property PECVD magnetron sputtering

Received: 30 December 2022 Published: 23 March 2023

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TG174.4

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	Articles by authors
	WANG Ling
	TAN Zhoujian
	CAI Zhixia
	LUO Ye
	ZHANG Fuqin
	ZHANG Xiang

Cite this article:

WANG Ling,TAN Zhoujian,CAI Zhixia, et al. Effect of silicon-doped amorphous carbon films on the tribologicalproperty of TC4[J]. Materials Science and Engineering of Powder Metallurgy, 2023, 28(1): 83-92.

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http://pmbjb.csu.edu.cn/EN/10.19976/j.cnki.43-1448/TF.2022095 OR http://pmbjb.csu.edu.cn/EN/Y2023/V28/I1/83

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